Silicon VLSI Technology – Funds, Practice and Mdlg

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Silicon VLSI Technology – Funds, Practice and Mdlg
Authors: J. Plummer
Year: 2000
Publisher: Prentice-Hall
Language: english
ISBN 13: 978-0130850379
ISBN 694130850373
Categorie: Electronic Engineering
Pages: 806
Edition:

Availability: 5000 in stock

SKU: 978-0130850379 Category:

Silicon VLSI Technology – Funds, Practice and Mdlg J. Plummer, et al.,

Unique in approach, this book provides an integrated view of silicon technology–with an emphasis on modern computer simulation. It describes not only the manufacturing practice associated with the technologies used in silicon chip fabrication, but also the underlying scientific basis for those technologies. Modern CMOS Technology. Crystal Growth, Wafer Fabrication and Basic Properties of Silicon Wafers. Semiconductor Manufacturing–Clean Rooms, Wafer Cleaning and Gettering. Lithography. Thermal Oxidation and the Si/SiO2 Interface. Dopant Diffusion. Ion Implantation. Thin Film Diffusion. Etching. Backend Technology. For anyone interested in Fabrication Processes.

Categories: Engineering – Electrical & Electronic Engineering
Year: 2000
Publisher: Prentice-Hall
Language: english
Pages: 806
File: 293 MB

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