Fabrication Engineering at the Micro- and Nanoscale. Solution manual

Fabrication Engineering at the Micro- and Nanoscale. Solution manual Stephen A. Campbell
Designed for advanced undergraduate or first-year graduate courses in semiconductor or microelectronic fabrication, the third edition of Fabrication Engineering at the Micro and Nanoscale provides a thorough and accessible introduction to all fields of micro and nano fabrication. Completelyrevised and updated, the text covers the entire basic unit processes used to fabricate integrated circuits and other devices. It includes more worked examples, illustrations, and expands coverage of the frontiers of fabrication processes. The physics and chemistry of each process are introduced along with descriptions of the equipment used to carry out the processes. The text uses a popular commercial process simulation suite–the Silvaco Athena® set of codes–to provide meaningful examples of many of the basic processes includingdiffusion, oxidation, lithography, and deposition. The book goes on to discuss the integration of these basic unit processes into various technologies, concentrating on CMOS transistors. The text breaks down the material into treatments on the concepts of process modules, thermal budget, advanced architectures, and the use of channel strain forimproved performance. click to read more
Categories:
Engineering
Year:
2008
Edition:
3
Publisher:
Oxford University Press
Language:
english
Pages:
75
ISBN 10:
0195320174
ISBN 13:
9780195320176
File:
618 KB